PREFERENTIAL EMISSION OF LIGHTER ISOTOPES IN THE INITIAL-STAGE OF SPUTTERING

被引:37
作者
GNASER, H
HUTCHEON, ID
机构
关键词
D O I
10.1016/0039-6028(88)90356-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:499 / 512
页数:14
相关论文
共 33 条
[1]  
ANDERSEN N, 1974, KGL DANSKE VIDENSKAB, V39
[2]   ISOTOPIC FRACTIONATION OF MAGNESIUM SPUTTERED BY 2 KEV HE+-IONS [J].
ARAI, O ;
TAZAWA, Y ;
SHIMAMURA, T ;
KOBAYASHI, K .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1979, 18 (07) :1231-1237
[3]  
Behrisch, 1983, SPUTTERING PARTICLE, V52
[4]  
Behrisch R., 1981, SPUTTERING PARTICLE, V1
[5]  
BEHRISCH R, 1987, SPUTTERING PARTICLE, V3
[6]  
Betz G., 1983, SPUTTERING PARTICLE, P11
[7]   COMPUTER-SIMULATION OF 2-COMPONENT TARGET SPUTTERING [J].
ECKSTEIN, W ;
BIERSACK, JP .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 37 (02) :95-108
[8]   ISOTOPIC FRACTIONATION OF LITHIUM IN SPUTTERING [J].
FLUIT, JM ;
BOERBOOM, AJ ;
KISTEMAKER, J ;
FRIEDMAN, L .
JOURNAL OF CHEMICAL PHYSICS, 1961, 35 (03) :1143-&
[9]   PREFERENTIAL SPUTTERING OF BINARY COMPOUNDS - A MODEL STUDY [J].
GARRISON, BJ .
SURFACE SCIENCE, 1982, 114 (01) :23-37
[10]   VELOCITY-DEPENDENT ISOTOPE FRACTIONATION IN SECONDARY-ION EMISSION [J].
GNASER, H ;
HUTCHEON, ID .
PHYSICAL REVIEW B, 1987, 35 (02) :877-879