NITRIDATION OF THE SOL-GEL-DERIVED TITANIUM-OXIDE FILMS BY HEATING IN AMMONIA GAS

被引：49

作者：

KAMIYA, K ^{[1
]}

NISHIJIMA, T ^{[1
]}

TANAKA, K ^{[1
]}

机构：

[1] KYOTO UNIV,FAC ENGN,DEPT IND CHEM,SAKYO KU,KYOTO 606,JAPAN

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1990年 / 73卷 / 09期

关键词：

films; sol–gel; titanium nitride; titanium oxide;

D O I：

10.1111/j.1151-2916.1990.tb06758.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Dip‐coated sol–gel‐derived TiO2 films on an alumina substrate were converted to nonstoichiometric titanium nitride (TiNx (x≦ 1)) films by heating at approxmately 1000°C in NH3 gas. TiO2 films made from TiO2 sols prepared from Ti(O–i‐C3H7)4 and stabilized by diethanolamine were more easily nitrided than those from sols containing HCl as a deflocculant reagent. This appears to be a result of the more porous structure of the former films. Copyright © 1990, Wiley Blackwell. All rights reserved

引用

页码：2750 / 2752

页数：3

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