FRICTION AND WEAR OF ION-IMPLANTED ALUMINUM

被引:14
作者
MADAKSON, PB
SMITH, AA
机构
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词
D O I
10.1016/0167-5087(83)90909-2
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:983 / 988
页数:6
相关论文
共 23 条
  • [1] CAROSELLA CA, 1979, ION IMPLANTATION MET, P103
  • [2] TECHNIQUES AND EQUIPMENT FOR NON-SEMICONDUCTOR APPLICATIONS OF ION-IMPLANTATION
    DEARNALEY, G
    GOODE, PD
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 189 (01): : 117 - 132
  • [3] DEARNALEY G, 1976, 4TH P C SCI IND APPL, P26
  • [4] DEARNALEY G., 1973, ION IMPLANTATION
  • [5] DEARNALEY G, 1981, AERE R10180
  • [6] Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700
  • [7] FRICTION AND WEAR OF ION-IMPLANTED METALS - REVIEW
    HARTLEY, NEW
    [J]. THIN SOLID FILMS, 1979, 64 (02) : 177 - 190
  • [8] HARTLEY NEW, 1980, ION IMPLANTATION, P321
  • [9] HARTLEY NEW, 1974, APPLICATIONS ION BEA, P123
  • [10] HARTLEY NEW, 1976, I PHYS C SER, V28, P210