SUPERCONDUCTING YBA2CU3OX FILMS PREPARED BY RF PLASMA FLASH EVAPORATION

被引：29

作者：

YUHYA, S ^{[1
]}

KIKUCHI, K ^{[1
]}

SHIOHARA, Y ^{[1
]}

TERASHIMA, K ^{[1
]}

YOSHIDA, T ^{[1
]}

机构：

[1] UNIV TOKYO,FAC ENGN,DEPT MET & MAT SCI,BUNKYO KU,TOKYO 113,JAPAN

来源：

JOURNAL OF MATERIALS RESEARCH | 1992年 / 7卷 / 10期

关键词：

D O I：

10.1557/JMR.1992.2673

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Superconducting YBa2Cu3Ox films were prepared by rf plasma flash evaporation on MgO(100)-single crystals. 4 MHz rf Ar-O2 plasma was used and Y-Ba-Cu-O (YBCO) powder as raw material was fed into the plasma. The growth rate of 730 nm/min was achieved. Texture of the grown films varied from a-axis orientation to c-axis with increasing growth temperature and decreasing growth rate. The films without heat treatment exhibited zero resistance temperature (T(c0)) more than 77 K. The deposited films using the stoichiometric powder were slightly poor in Y. The sample using Y-rich powder revealed nearly stoichiometric composition and exhibited a T(c0) of 90.6 K and a critical current density (J(c)) of 6.8 X 10(5) A/cm2 at 77 K in zero applied field.

引用

页码：2673 / 2679

页数：7

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