DEVELOPMENTS IN SINGLE-WAFER MULTIPROCESSING

被引：2

作者：

HARRISON, HB

机构：

[1] Griffith University, Faculty of Science and Technology, Nathan, Brisbane

来源：

MICROELECTRONICS JOURNAL | 1994年 / 25卷 / 01期

关键词：

D O I：

10.1016/0026-2692(94)90153-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Technological developments in rapid thermal processing (RTP) are reviewed and placed in context with regard to single wafer processing. The concept of multiprocess including RTP as a cluster tool is introduced, and the role of such tools in future technology is briefly considered.

引用

页码：1 / 8

页数：8