HOW TO SOLVE PROBLEMS OF FILMS COATED BY ARC METHODS

被引:18
作者
NISHIBORI, M
机构
[1] MN Vacuum Technology GmbH, Am Waldpark 9
关键词
D O I
10.1016/0257-8972(92)90020-B
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
ARC deposition methods are simple in construction and provide easy handling and economic operation for the production coating of wear-, erosion- and corrosion-resistant and decorative films. However, films coated by ARC deposition methods have many serious problems, such as porous and very rough surfaces and poor adhesion, in particular on substrates of large thermal capacity. The main cause of such problems is droplets from the cathode. Therefore many investigations into these have been carried out over the last few years. This paper focuses on the process of beating the cold surface of the substrate by high energy ion bombardment from the cathode. An attempt has been made to preheat the substrate using additional radiant heater units instead of ion bombardment. In this way a satisfactory improvement in the surface and adhesive quality of ARC-coated films on large cutting tools has been achieved.
引用
收藏
页码:229 / 233
页数:5
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