THE HOMOGENEOUS NUCLEATION OF CONDENSED SILICON IN THE GASEOUS SI-H-CL SYSTEM

被引：26

作者：

HERRICK, CS

WOODRUFF, DW

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 10期

关键词：

D O I：

10.1149/1.2115307

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2417 / 2422

页数：6

共 11 条

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[5]

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SANCHEZMARTINEZ, RA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) :455-458

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[8] THERMAL-DIFFUSION CLOUD CHAMBER STUDIES OF HOMOGENEOUS NUCLEATION [J].

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VIRKLER, TL .

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[9]

Lothe J., 1969, NUCLEATION, P109

[10] GAS-PHASE NUCLEATION DURING THERMAL-DECOMPOSITION OF SILANE IN HYDROGEN [J].

MURTHY, TUMS ;

MIYAMOTO, N ;

SHIMBO, M ;

NISHIZAWA, J .

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