FIELD-EMITTER ARRAY PERFORMANCE ENHANCEMENT USING HYDROGEN GLOW-DISCHARGES

被引：33

作者：

SCHWOEBEL, PR

SPINDT, CA

机构：

[1] Physical Electronics Laboratory, SRI International, Menlo Park

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.109741

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The changes in the current-voltage characteristics and electron emission spatial distribution of microfabricated field emitters following exposure to hydrogen low-pressure glow discharges have been investigated. The hydrogen discharge was found to result in a work function decrease typically between 0.5 and 1.5 eV following a dose of 10(18)-10(19) ions/cm2. The net result is a reduction in the operating voltage and an improvement in the spatial uniformity of the electron emission.

引用

页码：33 / 35

页数：3

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