THEORY OF CONCENTRIC DESIGNS FOR GRATING SPECTROMETERS

被引：80

作者：

LOBB, DR

机构：

[1] Sira Ltd., Chislehurst, Kent, BR7 5EH, South Hill

来源：

APPLIED OPTICS | 1994年 / 33卷 / 13期

关键词：

D O I：

10.1364/AO.33.002648

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A concentric optical design for a grating spectrometer is described. General aberration theory is given for a family of designs of similar form, showing close similarities with the theory for conventional concentric imagers used in microlithography. Control of stray radiation in the concentric grating spectrometer is discussed.

引用

页码：2648 / 2658

页数：11

共 11 条

[1] BAUDIN G, 1991, P SOC PHOTO-OPT INS, V1490, P102, DOI 10.1117/12.46615
[2] UNIT MAGNIFICATION OPTICAL SYSTEM WITHOUT SEIDEL ABERRATIONS
DYSON, J
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1959, 49 (07) : 713 - 716
[3] Hopkins H. H., 1950, WAVE THEORY ABERRATI
[4] CONCENTRIC SPECTROGRAPHS
MERTZ, L
[J]. APPLIED OPTICS, 1977, 16 (12): : 3122 - 3124
[5] MERTZ L, 1962, J OPT SOC AM, V52, pR11
[6] ANNULAR FIELD SYSTEMS AND THE FUTURE OF OPTICAL MICROLITHOGRAPHY
OFFNER, A
[J]. OPTICAL ENGINEERING, 1987, 26 (04) : 294 - 299
[7] RAST M, 1990, P SOC PHOTO-OPT INS, V1298, P114, DOI 10.1117/12.21342
[8] ROCKEY DE, 1990, P SOC PHOTO-OPT INS, V1298, P93, DOI 10.1117/12.21340
[9] THOMPSON LL, 1990, P SOC PHOTO-OPT INS, V1298, P105, DOI 10.1117/12.21341
[10] Welford W. T., 1965, PROGR OPTICS, VIV, P241

← 1 2 →