SUBMICRON SILICON POWDER PRODUCTION IN AN AEROSOL REACTOR

被引:14
作者
WU, JJ [1 ]
FLAGAN, RC [1 ]
GREGORY, OJ [1 ]
机构
[1] UNIV RHODE ISL,DEPT CHEM ENGN,KINGSTON,RI 02881
关键词
D O I
10.1063/1.97358
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:82 / 84
页数:3
相关论文
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