DOUBLE TWIN PATH INTERFEROMETER FOR THIN-FILM THICKNESS MEASUREMENT

被引：2

作者：

CHITNIS, VT

UCHIDA, Y

HANE, K

YONEDA, K

HATTORI, S

机构：

[1] MEIJO UNIV, FAC SCI & TECHNOL, DEPT ELECTR ENGN, TENPAKU KU, NAGOYA, AICHI 468, JAPAN

[2] AICHI INST TECHNOL, DEPT ELECT ENGN, TOYOTA 47003, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1986年 / 25卷 / 07期

关键词：

D O I：

10.1143/JJAP.25.1078

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1078 / 1083

页数：6

共 10 条

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[2] DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].

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[4] DIFFERENTIAL THICKNESS MEASUREMENT USING A POLARIZATION INTERFEROMETER [J].

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[5] THE MEASUREMENT OF THIN FILMS BY INTERFEROMETRY [J].

DYSON, J .

PHYSICA, 1958, 24 (06) :532-537

[6] COMMON-PATH INTERFEROMETER FOR TESTING PURPOSES [J].

DYSON, J .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1957, 47 (05) :386-390

[7] VERY STABLE COMMON-PATH INTERFEROMETERS AND APPLICATIONS [J].

DYSON, J .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1963, 53 (06) :690-&

[8]

Roberts R. B., 1981, Journal of Physics E (Scientific Instruments), V14, P1386, DOI 10.1088/0022-3735/14/12/009

[9]

YONEDA K, 1981, JPN J APPL PHYS S21, V21, P51

[10]

YONEDA K, 1979, ULTRASONIC S P NEW O, P57

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