HREM EXAMINATION OF ER ION-IMPLANTED IN SI

[1] RECOIL CONTRIBUTION TO ION-IMPLANTATION ENERGY-DEPOSITION DISTRIBUTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (08) : 3385 - 3394

[2] MAHER DM, 1986, MATER RES SOC S P, V52, P93

[3] TSUBOKAWA Y, 1986, 11TH P INT C EL MICR, P953

[4] Winterbon K. B., 1972, Radiation Effects, V13, P215, DOI 10.1080/00337577208231183

[1] RECOIL CONTRIBUTION TO ION-IMPLANTATION ENERGY-DEPOSITION DISTRIBUTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (08) : 3385 - 3394

[2] MAHER DM, 1986, MATER RES SOC S P, V52, P93

[3] TSUBOKAWA Y, 1986, 11TH P INT C EL MICR, P953

[4] Winterbon K. B., 1972, Radiation Effects, V13, P215, DOI 10.1080/00337577208231183