OPTICAL-PROPERTIES OF A-SI-H/A-SI1-XCX-H AND A-SI-H/A-SINX-H SUPERLATTICE

被引:18
作者
NISHIKAWA, S
KAKINUMA, H
FUKUDA, H
WATANABE, T
NIHEI, K
机构
[1] Oki Electric Industry Co, Research, Lab, Hachioji, Jpn, Oki Electric Industry Co, Research Lab, Hachioji, Jpn
关键词
AMORPHOUS SEMICONDUCTOR SUPERLATTICES - HYDROGENATED AMORPHOUS SILICON - HYDROGENATED AMORPHOUS SILICON CARBIDE - HYDROGENATED AMORPHOUS SILICON NITRIDE - OPTICAL ENERGY GAP;
D O I
10.1016/0022-3093(85)90844-0
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1077 / 1080
页数:4
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