CRYSTALLOGRAPHIC ORIENTATION CONTROL OF SILICON STRIPES IN SIO2 GROOVES USING A NEW DOUBLE LASER ANNEALING TECHNIQUE

被引：8

作者：

EGAMI, K ^{[1
]}

KIMURA, M ^{[1
]}

HAMAGUCHI, T ^{[1
]}

机构：

[1] NEC CORP,DIV RES & DEV PLANNING & TECH SERV,MIYAMAE KU,KAWASAKI 213,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 10期

关键词：

D O I：

10.1063/1.94611

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：962 / 964

页数：3

共 14 条

[1] LASER-INDUCED CRYSTALLIZATION OF SILICON ISLANDS ON AMORPHOUS SUBSTRATES - MULTILAYER STRUCTURES [J].

BIEGELSEN, DK ;

JOHNSON, NM ;

BARTELINK, DJ ;

MOYER, MD .

APPLIED PHYSICS LETTERS, 1981, 38 (03) :150-152

[2] LASER-INDUCED MELT DYNAMICS OF SI AND SILICA [J].

BOSCH, MA ;

LEMONS, RA .

PHYSICAL REVIEW LETTERS, 1981, 47 (16) :1151-1155

[3] LASER RECRYSTALLIZATION OF SILICON STRIPES IN SIO2 GROOVES WITH A POLYCRYSTALLINE SILICON SUBLAYER [J].

EGAMI, K ;

KIMURA, M ;

HAMAGUCHI, T .

APPLIED PHYSICS LETTERS, 1983, 43 (11) :1023-1025

[4] CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION [J].

GEIS, MW ;

FLANDERS, DC ;

SMITH, HI .

APPLIED PHYSICS LETTERS, 1979, 35 (01) :71-74

[5] CW LASER RECRYSTALLIZATION OF (100) SI ON AMORPHOUS SUBSTRATES [J].

GIBBONS, JF ;

LEE, KF ;

MAGEE, TJ ;

PENG, J ;

ORMOND, R .

APPLIED PHYSICS LETTERS, 1979, 34 (12) :831-833

[6] ORIGIN OF LAMELLAE IN RADIATIVELY MELTED SILICON FILMS [J].

HAWKINS, WG ;

BIEGELSEN, DK .

APPLIED PHYSICS LETTERS, 1983, 42 (04) :358-360

[7]

JELLISON GE, 1982, APPL PHYS LETT, V41, P180, DOI 10.1063/1.93454

[8] STRUCTURE AND STABILITY OF LOW-PRESSURE CHEMICALLY VAPOR-DEPOSITED SILICON FILMS [J].

KAMINS, TI ;

MANDURAH, MM ;

SARASWAT, KC .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (06) :927-932

[9] RECRYSTALLIZATION OF SI ON AMORPHOUS SUBSTRATES BY DOUGHNUT-SHAPED CW AR LASER-BEAM [J].

KAWAMURA, S ;

SAKURAI, J ;

NAKANO, M ;

TAKAGI, M .

APPLIED PHYSICS LETTERS, 1982, 40 (05) :394-395

[10] INFLUENCE OF AS-DEPOSITED FILM STRUCTURE ON (100) TEXTURE IN LASER-RECRYSTALLIZED SILICON ON FUSED QUARTZ [J].

KIMURA, M ;

EGAMI, K .

APPLIED PHYSICS LETTERS, 1984, 44 (04) :420-422

← 1 2 →