THIN SOLID FILMS OF CERAMIC AND DIAMOND AND THEIR APPLICATION

被引：6

作者：

YOSHIOKA, T ^{[1
]}

IMAI, O ^{[1
]}

OHARA, H ^{[1
]}

DOI, A ^{[1
]}

FUJIMORI, N ^{[1
]}

机构：

[1] SUMITOMO ELECT IND LTD,ITAMI RES & DEV GRP,ITAMI 664,JAPAN

来源：

SURFACE & COATINGS TECHNOLOGY | 1988年 / 36卷 / 1-2期

关键词：

D O I：

10.1016/0257-8972(88)90161-2

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：311 / 318

页数：8

共 5 条

[1]

Abe T., 1984, Journal of the Vacuum Society of Japan, V27, P398, DOI 10.3131/jvsj.27.398

[2]

Doi A., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1137

[3]

DOI A, 1984, 2ND P INT C SCI HARD, P743

[4]

DOI T, 1983, 30TH P C JAP SOC APP, P214

[5] PREPARATION AND CHARACTERIZATION OF TIC-COATED MOLYBDENUM WALL FOR THE JT-60 REACTOR [J].

FUJIMORI, N ;

YASHIKI, T ;

DOI, A ;

ABE, T ;

MURAKAMI, Y ;

MIZOGUCHI, T ;

ITO, Y .

THIN SOLID FILMS, 1984, 118 (01) :5-14

← 1 →