ALUMINUM METALLIZATION TECHNOLOGY FOR SEMICONDUCTOR-DEVICES

被引：5

作者：

GAROSSHEN, TJ

STEPHENSON, TA

SLAVIN, TP

机构：

来源：

JOURNAL OF METALS | 1985年 / 37卷 / 05期

关键词：

D O I：

10.1007/BF03257742

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

页码：55 / 59

页数：5

共 29 条

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