COMPARATIVE SOL-GEL PROCESSING OF PZT THIN-FILMS

被引：24

作者：

SAYER, M

YI, G

SEDLAR, M

机构：

[1] Department of Physics, Queen's University, Kingston, Ontario

来源：

INTEGRATED FERROELECTRICS | 1995年 / 7卷 / 1-4期

基金：

加拿大自然科学与工程研究理事会;

关键词：

D O I：

10.1080/10584589508220237

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Four major sol gel or metallorganic decomposition routes for the processing of lead zirconate have been established. The requirements and criteria for successful processing are reviewed, and the concept of a characteristic volume over which the gel is stoichiometric is introduced. The need for solution species of comparable size is outlined and means for ensuring this condition are discussed.

引用

页码：247 / 258

页数：12

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