EFFECT OF COATING ON THE PLASMA CHAMBER WALL IN RIKEN ELECTRON-CYCLOTRON RESONANCE ION-SOURCE

被引：17

作者：

NAKAGAWA, T

机构：

[1] The Institute of Physical and Chemical Research (RIKEN), Wako, Saitama, 351-01

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1991年 / 30卷 / 5B期

关键词：

ECR (ELECTRON CYCLOTRON RESONANCE) ION SOURCE; COATING EFFECT; PLASMA CHAMBER WALL; ALUMINUM OXIDE; MAGNESIUM OXIDE;

D O I：

10.1143/JJAP.30.L930

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The beam intensities of carbon, nitrogen, and argon ions from the RIKEN ECR (electron cyclotron resonance) ion source were measured before and after producing aluminum and magnesium ions. Aluminum and magnesium ions were produced by radially inserting a ceramic rod (Al2O3, MgO) into the plasma in the second stage of the ECR ion source. It has been observed that the beam intensities of higher-charge-state ions are enhanced after producing aluminum and magnesium ions. This is supported to be due to the effect of the coating of aluminum and magnesium oxide on the plasma chamber wall.

引用

页码：L930 / L932

页数：3