CORRELATION OF PROCESS AND SYSTEM PARAMETERS WITH STRUCTURE AND PROPERTIES OF PHYSICALLY VAPOUR-DEPOSITED HARD COATINGS

被引：142

作者：

RICKERBY, DS

BURNETT, PJ

机构：

[1] Harwell Lab, Didcot, Engl, Harwell Lab, Didcot, Engl

来源：

关键词：

D O I：

10.1016/0040-6090(88)90004-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：195 / 222

页数：28

共 37 条

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[2] BARRETT CS, 1966, STRUCTURE METALS, P465
[3] THE MECHANICAL-PROPERTIES OF WEAR-RESISTANT COATINGS .2. EXPERIMENTAL STUDIES AND INTERPRETATION OF HARDNESS
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[J]. THIN SOLID FILMS, 1987, 148 (01) : 51 - 65
[4] BURNETT PJ, 1987, THIN SOLID FILMS, V148, P40
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[6] THE STRESS IN ION-PLATED HFN AND TIN COATINGS
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[J]. THIN SOLID FILMS, 1985, 123 (03) : 223 - 234
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[J]. METALS TECHNOLOGY, 1982, 9 (FEB): : 60 - 75
[10] DOUTHWAITE RM, 1978, COMMUNICATION