PRODUCTION, CHARACTERISTICS AND SOME APPLICATIONS OF SHEET PLASMAS

被引:7
作者
SUNAKO, K
YAMAUCHI, K
NOGUCHI, T
NIHEI, T
WATANABE, H
TANIKAWA, T
TAKAYAMA, K
TSUGUEDA, T
机构
[1] ULVAC CORP,DIV RES & DEV,CHIGASAKI,KANAGAWA 253,JAPAN
[2] TOKAI UNIV,INST RES & DEV,HIRATSUKA,KANAGAWA 25912,JAPAN
关键词
D O I
10.1016/0168-583X(89)90265-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:636 / 639
页数:4
相关论文
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