FOCUSING GRATING COUPLER IN ALGAAS OPTICAL WAVE-GUIDE

被引：19

作者：

SUHARA, T

OKADA, K

SASO, T

NISHIHARA, H

机构：

[1] Department of Electronics, Faculty of Engineering, Osaka University, Osaka

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1992年 / 4卷 / 08期

关键词：

D O I：

10.1109/68.149903

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A focusing grating coupler (FGC) for focusing a guided wave into a spot in free space was fabricated in a III-V semiconductor waveguide for the first time. A FGC of 0.83 mm focal length and 0.5 X 0.5 mm2 aperture for an AlGaAs waveguide and 0.83-mu-m wavelength was designed and fabricated by electron-beam writing and reactive ion etching. Nearly diffraction-limited focus spot size of 2-mu-m and a coupling efficiency of 20% were obtained.

引用

页码：903 / 905

页数：3

共 12 条

[1]

BORN M, 1970, PRINCIPLES OPTICS, P469

[2] REACTIVE ION ETCHING OF GAAS USING A MIXTURE OF METHANE AND HYDROGEN [J].