NUCLEATION AND GROWTH OF THIN FILMS AS OBSERVED IN ELECTRON MICROSCOPE

被引：61

作者：

PASHLEY, DW

STOWELL, MJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1966年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.1492467

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：156 / &

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