THE DEPOSITION OF METALLIC CLUSTERS ON SURFACES

被引：2

作者：

EASTHAM, DA

机构：

[1] Daresbury Laboratory, Warrington

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1995年 / 28卷 / 10期

关键词：

D O I：

10.1088/0022-3727/28/10/029

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

It is shown how the rate of deposition of ionized clusters with a given energy range (from a cluster source) is dependent on the impact area, the energy spread in the beam and the source emittance. A novel technique, SLED (soft landing by electrostatic dispersion), is described for reducing the impact energies whilst still depositing a significant fraction of the total beam.

引用

页码：2176 / 2180

页数：5