OPTICAL THICKNESS MONITOR FOR THIN-FILM DEPOSITION

[1] *LA DETERMINATION DE LINDICE ET DE LEPAISSEUR DES COUCHES MINCES TRANSPARENTES [J]. JOURNAL DE PHYSIQUE ET LE RADIUM, 1950, 11 (07): : 310 - 314

[2] FEASIBILITY OF THIN-FILM THICKNESS MONITORING BY HOLOGRAPHIC INTERFEROMETRY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (03): : 1080 - +

[3] BEHRNDT KH, 1966, PHYSICS THIN FILMS

[4] OPTICAL FILM THICKNESS MONITORING [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (01) : 57 - &

[5] DIFFERENTIAL-REFLECTOMETER FOR MEASUREMENTS OF SMALL DIFFERENCES IN REFLECTIVITY [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (04) : 463 - 466

[6] OPTICAL THICKNESS MONITOR FOR THIN-FILM VACUUM DEPOSITION CONTROL [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1972, 43 (05) : 740 - +

[7] Maissel L.I., 1970, HDB THIN FILM TECHNO

[8] Ramo S., 2008, FIELDS WAVES COMMUNI

[9] MODES OF PROPAGATING LIGHT WAVES IN THIN DEPOSITED SEMICONDUCTOR FILMS [J]. APPLIED PHYSICS LETTERS, 1969, 14 (09) : 291 - &

[10] VANHEEL ACS, 1958, OPT ACTA, V5, P47

[1] *LA DETERMINATION DE LINDICE ET DE LEPAISSEUR DES COUCHES MINCES TRANSPARENTES [J]. JOURNAL DE PHYSIQUE ET LE RADIUM, 1950, 11 (07): : 310 - 314

[2] FEASIBILITY OF THIN-FILM THICKNESS MONITORING BY HOLOGRAPHIC INTERFEROMETRY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (03): : 1080 - +

[3] BEHRNDT KH, 1966, PHYSICS THIN FILMS

[4] OPTICAL FILM THICKNESS MONITORING [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (01) : 57 - &

[5] DIFFERENTIAL-REFLECTOMETER FOR MEASUREMENTS OF SMALL DIFFERENCES IN REFLECTIVITY [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (04) : 463 - 466

[6] OPTICAL THICKNESS MONITOR FOR THIN-FILM VACUUM DEPOSITION CONTROL [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1972, 43 (05) : 740 - +

[7] Maissel L.I., 1970, HDB THIN FILM TECHNO

[8] Ramo S., 2008, FIELDS WAVES COMMUNI

[9] MODES OF PROPAGATING LIGHT WAVES IN THIN DEPOSITED SEMICONDUCTOR FILMS [J]. APPLIED PHYSICS LETTERS, 1969, 14 (09) : 291 - &

[10] VANHEEL ACS, 1958, OPT ACTA, V5, P47