CONICR/CR SPUTTERED THIN-FILM DISKS

被引:62
作者
YAMADA, T
TANI, N
ISHIKAWA, M
OTA, Y
NAKAMURA, K
ITOH, A
机构
关键词
D O I
10.1109/TMAG.1985.1063963
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1429 / 1431
页数:3
相关论文
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OTA Y, 1985, UNPUB C IECE JAPAN