ALGORITHM FOR THE RIGOROUS COUPLED-WAVE ANALYSIS OF GRATING DIFFRACTION

被引：205

作者：

CHATEAU, N

HUGONIN, JP

机构：

[1] Institute d’Optique Théorique et Appliquée-Unité, Associée au Centre Nationale de la Recherche Scientifique No. 14, Orsay Cedex, 91403, Université de Paris-Sud

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1994年 / 11卷 / 04期

关键词：

D O I：

10.1364/JOSAA.11.001321

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Diffraction of light by periodic gratings is analyzed with a characteristic-matrix formalism based on a rigorous coupled-wave approach. This formalism is particularly convenient for modeling the diffraction by nonuniform periodic structures. In order to overcome numerical difficulties that are due to inhomogeneous eigenmodes, we propose a new algorithm that remains stable for gratings of any thickness. We obtain the stability by distinguishing in the computation the growing and the decaying inhomogeneous modes. Numerical examples and comparisons with previous results are given.

引用

页码：1321 / 1331

页数：11

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