SOME NOVEL DESIGN-FEATURES OF THE LBL METAL VAPOR VACUUM-ARC ION SOURCES

被引:29
作者
MACGILL, RA
BROWN, IG
GALVIN, JE
机构
关键词
D O I
10.1063/1.1141924
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The family of MEVVA (metal vapor vacuum arc) high current metal ion sources developed at LBL over the past several years has grown to include a number of different source versions with a wide range of some of the design and operational parameters. The MicroMEVVA source is a particularly compact version, about 2 cm diam and 10 cm long, while the MEVVA IV weighs some 30 kG. MEVVAs IV and V incorporate multiple cathode assemblies (16 and 18 separate cathodes, respectively), and the operating cathode can be switched rapidly and without downtime. The new MEVVA V embodiment is quite compact considering its broad beam (10 cm), high voltage (100 kV), and multiple cathode features. The large-area extractor grids used in MEVVA V were fabricated using a particularly simple technique, and they are clamped into position and can thus be changed simply and quickly. The electrical system used to drive the arc is particularly simple and incorporates several attractive features. In this article we review and describe a number of the mechanical and electrical design features that have been developed for these sources.
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页码:580 / 582
页数:3
相关论文
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