DIELECTRIC PROPERTIES OF RF SPUTTERED THIN ALUMINUM FLUORIDE FILMS

被引：9

作者：

PHAHLE, AM ^{[1
]}

HILL, AE ^{[1
]}

RUZINSKY, M ^{[1
]}

CALDERWOOD, JH ^{[1
]}

机构：

[1] UNIV SALFORD,SALFORD M5 4WT,ENGLAND

来源：

THIN SOLID FILMS | 1976年 / 38卷 / 01期

关键词：

D O I：

10.1016/0040-6090(76)90281-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：73 / 81

页数：9

共 16 条

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[3]

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[8] FRICTION OF SPUTTERED PTFE FILMS [J].

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[9]

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