ND2O3 THIN-FILMS DEPOSITED BY A NEW CHEMICAL VAPOR-DEPOSITION TECHNIQUE

被引：12

作者：

LANGLET, M ^{[1
]}

SHANNON, RD ^{[1
]}

机构：

[1] DUPONT CO,DEPT CENT RES & DEV,EXPTL STN,WILMINGTON,DE 19880

来源：

THIN SOLID FILMS | 1990年 / 186卷 / 01期

关键词：

D O I：

10.1016/0040-6090(90)90512-C

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：L1 / L5

页数：5

共 20 条

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