TEM STUDY OF ION-BEAM MIXED NICKEL SILICIDES FORMED ON SIC AT DIFFERENT IMPLANT TEMPERATURES

被引:6
作者
FATHY, D
HOLLAND, OW
NARAYAN, J
APPLETON, BR
机构
关键词
D O I
10.1016/0168-583X(85)90435-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
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页码:571 / 575
页数:5
相关论文
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