VIBRATIONAL STUDY OF THE SIO2/SI INTERFACE BY HIGH-RESOLUTION ELECTRON-ENERGY LOSS SPECTROSCOPY

被引：48

作者：

THIRY, PA ^{[1
]}

LIEHR, M ^{[1
]}

PIREAUX, JJ ^{[1
]}

SPORKEN, R ^{[1
]}

CAUDANO, R ^{[1
]}

VIGNERON, JP ^{[1
]}

LUCAS, AA ^{[1
]}

机构：

[1] FAC UNIV NOTRE DAME PAIX,PHYS MATH & PHYS SOLIDE LAB,B-5000 NAMUR,BELGIUM

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 04期

关键词：

D O I：

10.1116/1.583065

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1118 / 1121

页数：4

共 13 条

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[3] IBACH H, 1982, ELECTRON ENERGY LOSS, P78
[4] AUGER ANALYSIS OF SIO2-SI INTERFACE
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[5] LO-TO MODE SPLITTINGS AND DYNAMIC EFFECTIVE CHARGES OF OXYGEN IN REACTIVELY SPUTTERED SIOX DETERMINED BY IR SPECTROSCOPY
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[J]. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1982, 111 (02): : K103 - K106
[6] FORMIC-ACID ON ALUMINUM-OXIDE - A COMPARISON BETWEEN INELASTIC-ELECTRON-TUNNELING SPECTROSCOPY AND HIGH-RESOLUTION ELECTRON-ENERGY-LOSS SPECTROSCOPY
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THIRY, PA
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[J]. PHYSICAL REVIEW B, 1985, 31 (01): : 42 - 51
[7] HIGH-RESOLUTION ELECTRON-ENERGY LOSS SPECTROSCOPY OF AN ANISOTROPIC INSULATOR SURFACE - A TEST FOR THE DIELECTRIC THEORY
LIEHR, M
THIRY, PA
PIREAUX, JJ
CAUDANO, R
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 1079 - 1082
[8] Lucas A. A., 1972, Progress in Surface Science, V2, P76, DOI 10.1016/0079-6816(72)90002-0
[9] LUCAS AA, 1984, SOLID STATE COMMUN, V49, P397
[10] DETECTION OF VIBRATIONAL STATES OF GASES ADSORBED ON TUNGSTEN BY LOW-ENERGY ELECTRON SCATTERING
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PIPER, TC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (02): : 53 - &

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