DETERMINATION OF CARBON IN SILICON BY WET OXIDATION AND ELECTRICAL-CONDUCTIVITY MEASUREMENT

被引：7

作者：

LANZA, P

BULDINI, PL

机构：

[1] UNIV BOLOGNA,CHEM INST G CIAMICIAN,I-40126 BOLOGNA,ITALY

[2] CNR,LAMEL LAB,BOLOGNA,ITALY

来源：

关键词：

D O I：

10.1016/S0003-2670(01)82982-2

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：69 / 74

页数：6

共 20 条

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ENDO, Y
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[9] IMPROVED CONDUCTIMETRIC MEASUREMENT OF CARBON-DIOXIDE
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