SUPERSHALLOW LEVELS IN INDIUM-DOPED SILICON

被引:8
作者
CEROFOLINI, GF [1 ]
PIGNATEL, GU [1 ]
MAZZEGA, E [1 ]
OTTAVIANI, G [1 ]
机构
[1] UNIV MODENA,DEPARTIMENTO FIS,I-41100 MODENA,ITALY
关键词
D O I
10.1063/1.335988
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:2204 / 2207
页数:4
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