CROSS-SECTIONAL TEM SPECIMENS OF METAL CONTACTS TO SEMICONDUCTORS

被引:15
作者
IVEY, DG [1 ]
PIERCY, GR [1 ]
机构
[1] MCMASTER UNIV,DEPT MAT SCI & ENGN,HAMILTON L8S 4L8,ONTARIO,CANADA
来源
JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE | 1988年 / 8卷 / 02期
关键词
D O I
10.1002/jemt.1060080215
中图分类号
Q [生物科学];
学科分类号
07 ; 0710 ; 09 ;
摘要
引用
收藏
页码:233 / 235
页数:3
相关论文
共 3 条
[1]   THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY [J].
BRAVMAN, JC ;
SINCLAIR, R .
JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01) :53-61
[2]   IODINE ION MILLING OF INDIUM-CONTAINING COMPOUND SEMICONDUCTORS [J].
CHEW, NG ;
CULLIS, AG .
APPLIED PHYSICS LETTERS, 1984, 44 (01) :142-144
[3]   CROSS-SECTIONAL TEM SPECIMENS FROM METAL-CERAMIC COMPOSITES [J].
SHINDE, SL ;
DEJONGHE, LC .
JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1986, 3 (03) :361-362