MAGNETIC-PROPERTIES OF THE SENDUST TA2O5 MULTILAYER THIN-FILMS

被引：2

作者：

HUR, JH

PARK, NT

KWON, SI

SONG, HS

CHANG, HS

机构：

[1] Materials and Devices Research Center 1st Laboratory, Samsung Advanced Institute of Technology, Kyoungki-Do, Suwon

来源：

JOURNAL OF APPLIED PHYSICS | 1990年 / 67卷 / 09期

关键词：

D O I：

10.1063/1.344666

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The Sendust multilayer thin films were fabricated to improve magnetic properties by rf magnetron sputtering. The effective permeability of the film with 50 Å of a Ta2O5 middle layer was 1800 when annealed at 500°C. The coercivity of the film was 0.5 Oe. When the middle-layer thickness was thicker than 100 Å, the result showed no magnetic improvement in permeability and coercivity.

引用

页码：5137 / 5138

页数：2

共 3 条

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