EXACT AND APPROXIMATE EXPRESSIONS FOR TEMPERATURE-COEFFICIENT OF RESISTIVITY OF POLYCRYSTALLINE FILMS USING MAYADAS-SHATZKES MODEL

被引:33
作者
TELLIER, CR [1 ]
TOSSER, AJ [1 ]
机构
[1] UNIV NANCY 1,ELECTR LAB,F-54037 NANCY,FRANCE
关键词
D O I
10.1016/0040-6090(77)90448-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:141 / 147
页数:7
相关论文
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[6]   TEMPERATURE-COEFFICIENT OF RESISTIVITY OF POLYCRYSTALLINE RADIO-FREQUENCY SPUTTERED ALUMINUM FILMS [J].
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