COMPOSITION AND HARDNESS PROFILES IN ION-IMPLANTED METALS

被引:56
作者
PETHICA, JB [1 ]
HUTCHINGS, R [1 ]
OLIVER, WC [1 ]
机构
[1] BROWN BOVERI RES CTR,CH-5405 BADEN,SWITZERLAND
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词
D O I
10.1016/0167-5087(83)90911-0
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:995 / 1000
页数:6
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