ENERGY BROADENING IN ELECTRON-BEAMS - A COMPARISON OF EXISTING THEORIES AND MONTE-CARLO SIMULATION

被引：27

作者：

JANSEN, GH

GROVES, TR

STICKEL, W

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 01期

关键词：

D O I：

10.1116/1.583223

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：190 / 193

页数：4

共 18 条

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BOERSCH, H
[J]. ZEITSCHRIFT FUR PHYSIK, 1954, 139 (02): : 115 - 146
[3] CREWE AV, 1978, OPTIK, V50, P205
[4] MONTE-CARLO MODELING OF CURRENT DISTRIBUTION IN SHAPED ELECTRON-BEAMS
DAYAN, PS
JONES, GAC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1094 - 1097
[5] DECHAMBOST E, 1980, OPTIK, V55, P357
[6] ELKAREH AB, 1979, J APPL PHYS, V50, P5595
[7] ELECTRON-BEAM BROADENING EFFECTS CAUSED BY DISCRETENESS OF SPACE-CHARGE
GROVES, T
HAMMOND, DL
KUO, H
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1680 - 1685
[8] JANSEN GH, UNPUB P MICROCIR ENG, V83, P99
[9] KNAUER W, 1981, OPTIK, V59, P335
[10] LOEFFLER KH, 1969, Z ANGEW PHYSIK, V27, P145