STRENGTH CHARACTERIZATION OF SILICON MICROPROBES IN NEUROPHYSIOLOGICAL TISSUES

被引：112

作者：

NAJAFI, K

HETKE, JF

机构：

[1] Center for Integrated Sensors and Circuits, Bioelectrical Sciences Laboratory, Department of Electrical and Computer Science, University of Michigan, Ann Arbor

来源：

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING | 1990年 / 37卷 / 05期

关键词：

D O I：

10.1109/10.55638

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

Strength characteristics of thin-silicon probes in neural tissues have been determined experimentally. It is shown that by proper selection of the substrate length, width, and thickness, silicon substrates can be designed and used to penetrate a variety of biological tissues without breakage or excessive dimpling. Thin-silicon structures have a maximum fracture stress which is a factor of six larger than bulk silicon, and are very flexible and capable of bending to angles larger than 90°. Silicon substrates 15 um thick x 30 um wide can easily penetrate guinea pig and rat pia arachnoid layers with minimum dimpling and no breakage, while substrates 30 um thick x 80 um wide can penetrate guinea pig and rat dura mater repeatedly without breakage. Quantitative comparison on the relative toughness of neurophysiological tissues in rat and guinea pig have also been experimentally obtained. © 1990 IEEE

引用

页码：474 / 481

页数：8

共 16 条

[1]

ANDERSON DJ, 1989, IEEE T BIOMED ENG, V36, P673

[2] SOLID-STATE ELECTRODES FOR MULTICHANNEL MULTIPLEXED INTRACORTICAL NEURONAL RECORDING [J].

BEMENT, SL ;

WISE, KD ;

ANDERSON, DJ ;

NAJAFI, K ;

DRAKE, KL .

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1986, 33 (02) :230-241

[3]

BRINDLY G, 1963, J PHYS, V195, P479

[4] PERFORMANCE OF PLANAR MULTISITE MICROPROBES IN RECORDING EXTRACELLULAR SINGLE-UNIT INTRACORTICAL ACTIVITY [J].

DRAKE, KL ;

WISE, KD ;

FARRAYE, J ;

ANDERSON, DJ ;

BEMENT, SL .

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1988, 35 (09) :719-732

[5]

FRANK K, 1964, PHYS TECH, V5, pCH2

[6]

HAMBRECHT FT, 1977, FUNCTIONAL ELECTRICA

[7] SIMULTANEOUS INDIVIDUAL RECORDINGS FROM MANY CEREBRAL NEURONS - TECHNIQUES AND RESULTS [J].

KRUGER, J .

REVIEWS OF PHYSIOLOGY BIOCHEMISTRY AND PHARMACOLOGY, 1983, 98 :177-233

[8] A HIGH-YIELD IC-COMPATIBLE MULTICHANNEL RECORDING ARRAY [J].

NAJAFI, K ;

WISE, KD ;

MOCHIZUKI, T .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (07) :1206-1211

[9] AN IMPLANTABLE MULTIELECTRODE ARRAY WITH ON-CHIP SIGNAL-PROCESSING [J].

NAJAFI, K ;

WISE, KD .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1986, 21 (06) :1035-1044

[10]

OBERMEIR E, 1986, JUN SOL STAT SENS AC

← 1 2 →