AMORPHOUS METALLIZATIONS FOR HIGH-TEMPERATURE SEMICONDUCTOR-DEVICE APPLICATIONS

被引:46
作者
WILEY, JD
PEREPEZKO, JH
NORDMAN, JE
GUO, KJ
机构
[1] UNIV WISCONSIN,DEPT MET & MINERAL ENGN,MADISON,WI 53706
[2] CHINESE ACAD SCI,SHANGHAI INST MET,SHANGHAI,PEOPLES R CHINA
关键词
D O I
10.1109/TIE.1982.356654
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:154 / 157
页数:4
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