GENERATION OF MICROPATTERNS IN POLY(3-METHYL-THIOPHENE) FILMS USING MICROLITHOGRAPHY - A 1ST STEP IN THE DESIGN OF AN TOTALLY ORGANIC THIN-FILM TRANSISTOR

被引:20
作者
KOBEL, W
KIESS, H
EGLI, M
机构
[1] Lab RCA Ltd, Zurich, Switz, Lab RCA Ltd, Zurich, Switz
关键词
ELECTROCHEMISTRY - LITHOGRAPHY - PLASTICS FILMS - Applications - SEMICONDUCTING POLYMERS - Applications - SOLID STATE DEVICES; THIN FILM - Materials;
D O I
10.1016/0379-6779(88)90224-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A thin-film transistor structure was designed using poly(3-methyl-thiophene) in its oxidized (highly conducting: sigma approximately equals 2 multiplied by 10**4 S/m) state as source and drain contacts, and the same material in its reduced (semiconducting: sigma approximately equals 10** minus **7 S/m) state as channel. The source, drain and channel zones can be defined by means of electrochemical and microlithographic procedures. The ultimate resolution is in the submicron range.
引用
收藏
页码:265 / 271
页数:7
相关论文
共 14 条
  • [1] SOLID-STATE MICROELECTROCHEMISTRY - ELECTRICAL CHARACTERISTICS OF A SOLID-STATE MICROELECTROCHEMICAL TRANSISTOR BASED ON POLY(3-METHYLTHIOPHENE)
    CHAO, S
    WRIGHTON, MS
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1987, 109 (07) : 2197 - 2199
  • [2] ORGANIC CONDUCTING POLYMERS DERIVED FROM SUBSTITUTED THIOPHENES AS ELECTROCHROMIC MATERIAL
    GARNIER, F
    TOURILLON, G
    GAZARD, M
    DUBOIS, JC
    [J]. JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1983, 148 (02): : 299 - 303
  • [3] HIKITA M, 1985, JPN J APPL PHYS LETT, V24, P79
  • [4] CHARACTERIZATION OF POLY(3-METHYLTHIOPHENE) FILMS BY IR, ELEMENTAL ANALYSIS, THERMOGRAVIMETRY AND MASS-SPECTROMETRY
    KOBEL, W
    KIESS, H
    EGLI, M
    KELLER, R
    [J]. MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 1986, 137 (1-4): : 141 - 150
  • [5] FIELD-EFFECT TRANSISTOR WITH POLYTHIOPHENE THIN-FILM
    KOEZUKA, H
    TSUMURA, A
    ANDO, T
    [J]. SYNTHETIC METALS, 1987, 18 (1-3) : 699 - 704
  • [6] LLOYD JP, 1983, THIN SOLID FILMS, V99, P99
  • [7] AMPLIFICATION OF ELECTRICAL SIGNALS WITH MOLECULE-BASED TRANSISTORS - POWER AMPLIFICATION UP TO A KILOHERTZ FREQUENCY AND FACTORS LIMITING HIGHER FREQUENCY OPERATION
    LOFTON, EP
    THACKERAY, JW
    WRIGHTON, MS
    [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1986, 90 (23) : 6080 - 6083
  • [8] POLYPYRROLE FOR USE IN INFORMATION-STORAGE
    MEYER, WH
    KIESS, H
    BINGGELI, B
    MEIER, E
    HARBEKE, G
    [J]. SYNTHETIC METALS, 1985, 10 (04) : 255 - 259
  • [9] MEYERHOFER D, CHROME ON QUARTZ MAS
  • [10] PHOTOELECTROCHEMICAL POLYMERIZATION OF PYRROLE ON TIO2 AND ITS APPLICATION TO CONDUCTING PATTERN GENERATION
    OKANO, M
    ITOH, K
    FUJISHIMA, A
    HONDA, K
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (04) : 837 - 841