THE LIGA TECHNIQUE AND ITS POTENTIAL FOR MICROSYSTEMS - A SURVEY

被引:85
作者
BACHER, W
MENZ, W
MOHR, J
机构
[1] Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik
关键词
D O I
10.1109/41.464604
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
The LIGA technique which is being developed at the Research Center Karlsruhe offers the possibility to manufacture microstructures with arbitrary lateral geometry, lateral dimensions down to below 1 mu m and aspect ratios up to 500 from a variety of materials (metals, plastics, and ceramics). The basic steps of X-ray lithography, electroplating, and plastic molding, are briefly described. Examples of applications of the LIGA technique are: optical components (high performance microspectrometer), mechanical components (acceleration sensor with integrated temperature compensation), and fluidic components (micropumps) which are presented and discussed. Microcomponents will be of limited interest in the future if it will not be possible to integrate them into microsystems. Microsystems must be more powerful than the sum total of their components. This is discussed in the final chapter of this article.
引用
收藏
页码:431 / 441
页数:11
相关论文
共 25 条
[1]  
Becker E.W., Ehrfeld W., Hagmann P., Maner A., Munchmeyer D., Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic molding (LIGA process), Microelectron. Eng., 4, (1986)
[2]  
Harmening M., Ehrfeld W., Untersuchung zur Abformung von galvanisierbaren Mikrostrukturen mit großer Strukturhöhe aus elektrisch leitfähigen und isolierenden Kunststoffen, KfK-Bericht 4711, (1990)
[3]  
Schomburg W.K., Bley P., Hein H., Mohr J., Masken für die Röntgentiefenlithographie, VDI Berichte, 870, (1990)
[4]  
Bacher W., Bley P., Hein H., Klein U., Mohr J., Schomburg W.K., Schwarz R., Stark W., Herstellung von Röntgenmasken für das LIGA-Verfahren, KfK-Nachrichten, 23, 2-3, (1991)
[5]  
Schomburg W.K., Baving H.J., Bley P., Ti- and Be-X-ray masks with alignment windows for the LIGA process, Microelectron. Eng., 13, (1991)
[6]  
El-Kholi A., Bley P., Gottert J., Mohr J., Examination of the solubility and the molecular weight distribution of PMMA in view of an optimized system in deep etch X-ray lithography, Microelectron. Eng., 21, (1993)
[7]  
Ehrfeld W., Baving H.J., Beets D., Bley P., Gotz F., Mohr J., Munchmeyer D., Schelb W., Progress in deep-etch synchrotron radiation lithography, J. Vac. Sci. Technol, B6, 1, (1988)
[8]  
Harsch S., Ehrfeld W., Maner A., Untersuchungen zur Herstellung von Mikrostrukturen großer Strukturhöhe durch Galvanoformung in Nickelsulfamatelektrolyten, KfK-Bericht 4455, (1988)
[9]  
Thommes A., Bacher W., Leyendecker K., Stark W., Liebscher H., Jakob C., LIGA microstructures from a NiFe alloy: Preparation by electroforming and their magnetic properties, Proc. 1985 Meeting Amer. Electrochem. Soc., 94-6, (1993)
[10]  
Michel A., Ruprecht R., Harmening M., Bacher W., Abformung von Mikrostrukturen auf prozessierten Wafern, KfK-Bericht 5171, (1993)