COMBUSTION GAS SENSITIVITY OF ZEOLITE LAYERS ON THIN-FILM CAPACITORS

被引：55

作者：

PLOG, C ^{[1
]}

MAUNZ, W ^{[1
]}

KURZWEIL, P ^{[1
]}

OBERMEIER, E ^{[1
]}

SCHEIBE, C ^{[1
]}

机构：

[1] TECH UNIV BERLIN,D-13355 BERLIN,GERMANY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 25卷 / 1-3期

关键词：

GAS SENSORS; INTERDIGITAL CAPACITORS; ZEOLITE;

D O I：

10.1016/0925-4005(95)85091-0

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Y-zeolites doped with platinum by an ion-exchange process have been used as gas-sensitive layer material on thin-film interdigital capacitors (IDCs). The zeolite-IDC sensor sensitivity has been determined for C4H10, CO and H-2 in wet air by exciting the sensor with an alternating voltage and determining the impedance response.

引用

页码：403 / 406

页数：4

共 5 条

[1]

KURZWEIL P, 1995, SENSOR ACTUAT B-CHEM, V24, P655

[2] 2-DIMENSIONAL AND 3-DIMENSIONAL INTERDIGITAL CAPACITORS AS BASIC ELEMENTS FOR CHEMICAL SENSORS [J].