MEASUREMENT OF GAS FLUX DISTRIBUTIONS FROM SINGLE CAPILLARIES USING A MODIFIED, UHV-COMPATIBLE ION GAUGE, AND COMPARISON WITH THEORY

被引：16

作者：

ADAMSON, S ^{[1
]}

MCGILP, JF ^{[1
]}

机构：

[1] UNIV CALIF DAVIS,DEPT APPL SCI,DAVIS,CA 95616

来源：

VACUUM | 1986年 / 36卷 / 04期

关键词：

D O I：

10.1016/0042-207X(86)90005-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：227 / 232

页数：6

共 12 条

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