METHOD FOR NUMERICAL INVERSION OF THE ELLIPSOMETRY EQUATION FOR TRANSPARENT FILMS

被引：36

作者：

YORIUME, Y

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1983年 / 73卷 / 07期

关键词：

D O I：

10.1364/JOSA.73.000888

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：888 / 891

页数：4

共 11 条

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J].

ARCHER, RJ .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) :970-&

[2]

AZZAM RMA, 1977, ELLIPSOMETRY POLARIZ, pCH4

[3] THICKNESS CALCULATIONS FOR A TRANSPARENT FILM FROM ELLIPSOMETRIC MEASUREMENTS [J].

GHEZZO, M .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1968, 58 (03) :368-&

[4] OPTICAL CHARACTERIZATION OF THIN-FILMS - THEORY [J].

HANSEN, WN .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1973, 63 (07) :793-802

[5] DESIGN AND OPERATION OF ETA, AN AUTOMATED ELLIPSOMETER [J].

HAUGE, PS ;

DILL, FH .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1973, 17 (06) :472-489

[6] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].

MCCRACKIN, FL ;

PASSAGLIA, E ;

STROMBERG, RR ;

STEINBERG, HL .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+

[7] ELLIPSOMETER DATA-ANALYSIS WITH A SMALL PROGRAMMABLE DESK CALCULATOR [J].

REINBERG, AR .

APPLIED OPTICS, 1972, 11 (05) :1273-&

[8] GENERALIZED ELLIPSOMETRIC METHOD FOR ABSORBING SUBSTRATE COVERED WITH A TRANSPARENT-FILM SYSTEM - OPTICAL-CONSTANTS OF SILICON AT 3655 A [J].

SO, SS ;

VEDAM, K .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (01) :16-&

[9] SIMULTANEOUS AND INDEPENDENT DETERMINATION OF REFRACTIVE INDEX AND THICKNESS OF THIN FILMS BY ELLIPSOMETRY [J].

VEDAM, K ;

RAI, R ;

LUKES, F ;

SRINIVASAN, R .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1968, 58 (04) :526-+

[10] ELLIPSOMETRIC METHOD FOR SEPARATE MEASUREMENTS OF N AND D OF A TRANSPARENT FILM [J].

YAMAGUCHI, T ;

TAKAHASHI, H .

APPLIED OPTICS, 1975, 14 (08) :2010-2015

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