PREPARATION OF ZNO THIN FILMS BY SPUTTERING OF COMPOUND IN OXYGEN AND ARGON - (0.1 TO 10 MU THICK - SUBSTRATES - SAPPHIRE PYREX GLASS GOLD PLATE - ULTRASONICS - PIEZOELECTRICS - TRANSDUCERS - E)

被引:87
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ROZGONYI, GA
POLITO, WJ
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10.1063/1.1754564
中图分类号
O59 [应用物理学];
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页码:220 / &
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