PLASMA ELECTRON-ENERGY DISTRIBUTION OF A BEAM-PLASMA TYPE ION-SOURCE

被引:3
作者
ISHIKAWA, J
EKTESSABI, AM
TAKAGI, T
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1983年 / 22卷 / 02期
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D O I
10.1143/JJAP.22.309
中图分类号
O59 [应用物理学];
学科分类号
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页码:309 / 314
页数:6
相关论文
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