INVESTIGATION OF CHEMICAL PROPERTIES OF STAIN FILMS ON SILICON BY MEANS OF INFRARED SPECTROSCOPY

被引：120

作者：

BECKMANN, KH

机构：

来源：

关键词：

D O I：

10.1016/0039-6028(65)90002-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：314 / &

共 25 条

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