MULTILAYER IONIC DEVICES FABRICATED BY THIN-FILM AND THICK-FILM TECHNOLOGIES

被引：9

作者：

MADOU, M

OTAGAWA, T

TIERNEY, MJ

JOSEPH, J

OH, SJ

机构：

[1] Teknekron Sensor Development Corporation (TSDC), Menlo Park, CA 94025

来源：

SOLID STATE IONICS | 1992年 / 53卷

关键词：

D O I：

10.1016/0167-2738(92)90363-T

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A variety of ionic devices based on thin- and thick-film technologies as well as micromachining techniques have been developed at TSDC, and are discussed in this review paper. Five ionic devices are exampled: a LaF3-based fuel cell, LaF3 smart humidity/temperature sensor, room-temperature micro-electrochemical smart sensor (RT-MECSS), back cell electrochemical gas sensor, and air electrolyte gas sensor. The benefits and problems in merging thin- and thick-film technologies in developing these devices are discussed.

引用

页码：47 / 57

页数：11

共 8 条

[1] INVESTIGATIONS OF ELECTRODES FOR OXYGEN SENSORS BASED ON LANTHANUM TRIFLUORIDE AS SOLID ELECTROLYTE [J].