INVESTIGATIONS OF ION-IMPLANTABLE SUB-MICRON BUBBLE MATERIAL

被引:4
作者
KRAFFT, CS
WANG, X
KRYDER, MH
机构
关键词
D O I
10.1109/TMAG.1982.1062142
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:1283 / 1285
页数:3
相关论文
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